All principal fastening and joining methods used to assemble plastic parts today are described with their particular advantages and disadvantages. The third edition of this comprehensive handbook emphasizes the relationship between the assembly methods, the materials, and the plastics manufacturing processes, thus enabling the reader to identify the best designassembly method for a given application. Although the individual sacrificial and structural layer thicknesses are determined by the polymumps fabrication process, three design variants with different. Fundamentals of plastic part design part 4 ribs and bosses. Drc is to layout what a spelling checker is to a word processorit indicates where your design may be faulty. Any parameter may be modified, if necessary, to meet design rules. Reduction in size of a mechanical system generally increases the structural stiffness, even at a thickness of 1.
A guide to designing safer polymers based on the principles of green chemistry and the epas polymer exemption rule green chemistry, the design of chemical products and processes that reduce or eliminate the use and generation of hazardous substances, is a powerful tool in designing safer polymers. Spie 6152, metrology, inspection, and process control for microlithography xx, 615201 24 march 2006. As with poly1, the last rule guarantees release of large polysilicon microstructures. Though this document is geared toward designers who do not have a strong background in microfabrication, it contains information that is useful to all polymumps users. Memscap reference material and mems multi project wafer. Additionally, cmd considers the functional limitations from both ansys and cadence virtuoso while performing the design rearrangement, in order to guarantee its compatibility with both. Epoxide diamine h2n nh2 so2ch3 you do not have to consider stereochemistry. It can be noticed from the simulation results that designs with folded beams suffer less from residual stress than those incorporating lined beams. Slide set 4 layout and design rules steve wilton dept. Besides, designers have to comply with foundries design rules in their plans elbuken and et al. In previous work we have shown that the polymumps process will provide an adequate foundational structure for the device, meeting the initial outofplane deflection and flexibility requirements. This algorithm minimizes the number of elements added to the structure, while guarantying the fulfillment of the design rules imposed by the technology. Design rules for selfassembled block copolymer patterns.
Jan 24, 2016 chalkboard description of a simple cantilever design introducing mems polymumps process application. Lecture 4 a wide variety of mems devices including. Using nano silicasbr vulcanizates, performance of the device was evaluated and the effects of silanization of. Feb 14, 2015 this lecture was given spring 2015 to my cnm mems design class. Cost estimation, a key factor of the design process, is investigated in detail before the relative merits of the different types of plastics.
Assembly method limitations for a given material andor a given molding process. As the foundation of the mumps program, polymumps has driven the idea of the standard process approach as a clear path to device functionality and volume production. Cross sectional view showing all 7 layers of the polymumps process not to scale. For instance, we consider the resonant frequency of the microphone diaphragm as a design restriction. Ribs are a great way to add strength and stiffness to a part while keeping material consumption to a minimum. The rules have evolved through process development, the experience of the memscap staff, and most importantly, experience from previous polymumps. This work proposes a novel characterization method based on an.
Design flexibility high aspectratio combined poly and singlecrystal silicon harpss mems technology 2 ringtype gyroscope 1. Though this document is geared toward designers who do not have a strong background in microfabrication, it contains information that is useful to all metalmumps users. An introduction to surfacemicromachining book, 2004. Xee\ frontmatter more informatio n have mature design rules that enable the separation of design and fabrication challenges. Based on my understanding of a physical designer for microprocessors but not mems related field. Garnett is working in cooperation with other researchers to determine the effectiveness of the principal ingredients of polymva for other uses and developing other powerful compounds. Memscap offers three standard processes as part of the mumps program. Editorsinchief professor krzysztof matyjaszewski, phd. A practical guide plastics design library pdf, epub, docx and torrent then this site is not for you. In the case of polymumps sensors, the optimum location for both. Please refer to the design rules for more information on this topic. Test equipment design, construction, and evaluation of a modi.
Liga processes that provide reasonable design flexibility within set guidelines. Memscap a publicly traded mems company 4162017 mumps design rules. Engineering curriculum development in microsystems. Sound starts at 2minutes fast forward to the 2min mark. The full set of proceedings also includes volumes on dynamic behavior of materials, mechanics of biological systems and materials, mechanics of. Poly0 poly1 poly2 metal nitride 1st oxide 2nd oxide figure 1. Jul 20, 2016 rex plastics product development plastic part design fundamentals ribs and bosses rib design. As mentioned above, rule t applies to the special case where a stack o f poly 1 and poly 2 must be released. We used the design rules of the summit v fabrication process, in which the mechanical properties and dimensions of the thickness h of each polysilicon layer and the gap distance g are parameters determined by this fabrication process. Average values of the initial polysi 2 and metal stresses and thermal expansion coefficients were obtained from the polymumps design rules. It allows user programmable rules for automatic checking of widths, spacing, and overlaps. The data included in the handbook of polymers come from open literature published articles, conference papers, and books, literature available from manufacturers of various grades of polymers, plastics, and finished products, and patent literature. If youre looking for a free download links of handbook of plastics joining. Design features and concepts are then covered, as is how to interpret the plethora of data available.
University of new south wales centre for advanced macromolecular design, sydney, australia. The readers product to be designed can directly or. Soimumps design guidelines and rules chapter 2 soimumps design rules and considerations 2. Be sure to check regularly for updates to the design rules. Vinayak rakesh senior developer bloomberg lp linkedin. Design rules for selfassembled block copolymer patterns using tiled templates. The multiuser mems processes mumps is an arpasupported program created to. How can cad tools like tanner eda tools and coventor. Memscap polymumps and mems multi project wafer service. The present work, discusses the design, construction, and evaluation of a modi.
A polymumps capacitive micromachined ultrasonic transducer cai. The following is a general process description and user guide for polymumps, which is designed for general purpose micromachining of mems. Customers such as lucent and the former omm utilized polymumps. By clicking on it, cmd internally performs a design adjustment. Designed the accelerometers according the polymumps design rules to be fabricated in france tested the accelerometers for their sensitivities coauthored a paper presented at international. However, formatting rules can vary widely between applications and fields of interest or study. Is the residual stress data for metal on the polymumps run data web pages for the gold itself or the gold. Design and modeling of a mems dualbackplate capacitive. There should be no overlap except where you want to connect p1 and p2 or remove p1 for double height structures. The design rules limit the designers to specific materials, structural layers, and fabrication processes to those of the fabrication facility. Then you can use a subset of the rules to estimate what the layout will look like, and if it meets your standards you can begin the actual. A polymumps capacitive micromachined ultrasonic transducer.
A good way to start is to begin with a stick diagram of the cell you want to layout. The duallevel design exhibits a rate of capacitance change per degree celsius that. The book has been completely updated and a new chapter on laser welding of plastics has been added. As the components we produce are typically part of a larger assembly many customers have benefited from our part consolidation recommendations that allow us to design, develop, manufacture, test, package and ship their completed assembly. Pdf engineering curriculum development in microsystems. Chalkboard description of a simple cantilever design introducing mems polymumps process application. Polymumps, a threelayer polysilicon surface micromachining process. Achieving nanoscale horizontal separations in the standard 2. The proposed design is implemented sidebyside with four different singlelevel designs to enable a design to design performance comparison. Layout of a simple bridge with one row and one pass. Joining of plastics 3e handbook for designers and engineers. Polymers are present within many haircare products and are used to modify the appearance of hair, for example to make it straighter or to change its colour. Design, construction, and evaluation of a modified rolling. For the exclusive use of adopters of the book introduction to microelectronic.
The plastics design library series pdl is a collection of data books, reference works and practical guides covering plastics engineering, applications, processing, manufacturing, material selection, product design, recycling and waste, and innovative materials. Pdf micromachined thermal multimorph actuators fabricated by. Using the design rules while the magic scmos design rules are simplified, there are still a number of rules to remember. A detailed modeling and simulation of this gripping system has been. A novel process for fabricating slender and compliant suspended polysi. A design methodology, device fabrication, and device characterization are presented. The key is not cad tools, but the data given to the tool. If the rules are followed, the students will get what they have designed. However, the device design requires components whose axis geometries are. Polymumps design guidelines and rules chapter 2 polymumps design guidelines and rules 2.
Actuators free fulltext the effects of structure thickness, air. Micromachines free fulltext afmbased characterization. Carnegie mellon university department of chemistry, 4400 fifth avenue, pittsburgh, pennsylvania, 152, united states. This paper presents a novel duallevel capacitive microcantileverbased thermal detector that is implemented in the commercial surface micromachined polymumps technology. While the use of a standard process leads to limitations.
Afmbased characterization method of capacitive mems pressure. As the relationship between materials, parts and enduse. This book puts the structure and function of knowledge firmly in the driving seat of. Toward fullchip prediction of yieldlimiting contact patterning failure. We come from a background that teaches us that the rules of monogamy are the only way to run a relationship. They range from toys to medical devices to cars to boats to underwater devices to containers to springs to pipes to buildings to aircraft to space craft. The book discusses such recent technologies as friction riveting, friction spot joining and ultrasonic joining. This lecture was given spring 2015 to my cnm mems design class. For example, the gap between the arms in a parallel beam is 12. Considering the design rule restrictions, the radii of the cmut. After introducing the design basics, the book moves on to discuss those factors which influence design.
Leditdrc only two keys is ledit with a built in design rule checker. Polymumps is the industrys longestrunning mems multiproject wafer service, with over a decade of history. Chapter 1 of this document explains the process stepbystep, while chapter 2 outlines the design rules for the process. Draw the structure of the repeat unit of the polymer that results when this epoxide and this diamine are heated together. However, the polymumps design handbook does not provide any. Figure 11 includes a summary of the statistical data analyzed by the program for a polymumpsbased sensor design. Draw the structure of the repeat unit of the polym. Hide everything except p1, p1hole, p2, p2hole and p12via. A detailed modeling and simulation of this gripping system has been carried out using the design rules of standard. Rex plastics product development plastic part design fundamentals ribs and bosses rib design. After patterning the photoresist, the poly 0 layer is then etched in a plasma etch system figure 1. Volume 18 issue 2 journal of micronanolithography, mems. Available through europractice the baseline process of the the mumps program is the 3 layer 2 polysilicon surface micromachining process known as polymumps polymumps developed in berkeley bsac in the 80s.
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